[mems-talk] Re:SOG etchant

[Dong Cai]

Indusekhar,

Thank you for your answer! I have SOG on a Al2O3
coated structure. After the process that requires
baking
of SOG, I want to reveal the Al2O3 surface.
Unfortunately, HF removed both layers. Maybe I need to
try lower concentration. Are there any other recipes
having better etching result on this combination?

Dong  


From: "Indusekhar" <indusekhar at sitarindia.com> 
To: mems-talk at memsnet.org 
Date: Wed, 25 Apr 2007 09:46:00 +0530 
Subject: [mems-talk] SOG removal 

SOG removal:
If you have not baked , it can be removed with IPA.
IF SOG is baked after coating, you can etch with
buffered HF solution.

Indusekhar