[mems-talk] Nit and Oxide etching.

cal Bear iamacalbear at hotmail.com
Wed Apr 25 14:29:57 EDT 2007


hello,

I am trying to find a way to etch Nit faster than silicon oxide layer (under 
the same conditions).
I am hoping get 50:1 type of etching ratio (more nitride removal than the 
oxide layer).  We have tried a couple of things but nothing has really 
panned out...any suggestions?

Mike



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