[mems-talk] ask for reference on gold-gold thermal compress wafer bonding

胡小东 hu_xiaodong at 163.com
Thu Apr 26 21:50:15 EDT 2007


Hi,All,

    Would someone give some useful references on gold-gold thermal compress wafer bonding?
    I'd like to bonding wafers by this mean. There is a book named "semiconductor wafer bonding: science and technology". I'm buying it, but it will takes months for us to get the book. 
    So any electronic version paper on the subject?
    Thanks!
                               Hu Xiaodong
                               Hu_xiaodong at 163.com
                               Hebei Semiconductor Research Institute


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