[mems-talk] ask for reference on gold-gold thermal compress wafer
bonding
胡小东
hu_xiaodong at 163.com
Thu Apr 26 21:50:15 EDT 2007
Hi,All,
Would someone give some useful references on gold-gold thermal compress wafer bonding?
I'd like to bonding wafers by this mean. There is a book named "semiconductor wafer bonding: science and technology". I'm buying it, but it will takes months for us to get the book.
So any electronic version paper on the subject?
Thanks!
Hu Xiaodong
Hu_xiaodong at 163.com
Hebei Semiconductor Research Institute
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