[mems-talk] Adhesion Layer for Ag and Al

Xinhua Zang xinhua.zang at gmail.com
Mon Apr 30 14:48:24 EDT 2007


Hi All,

Recently I evaporated Al and Ag onto a silicon substrate with thermal oxide.
I did not use any adhesion layer. Al layer seems to be ok, but Ag layer is
peeling off. Could some body suggest an adhesion layer for Ag like Cr or Ti.


Thanks,
Xinhua


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