[mems-talk] Problem with DC Sputter

[saravan kallempudi]

Dear Members,

I have a problem with my DC sputter. We used to sputter Nickel but we have strange problem now having plasma inside chamber but unable to sputter nickel. I thought of target poisoning and I cleaned the target with Nitricacid and then also I was not able to move forward. Can anyone suggest me in this!
Thanks in Advance,

Kallempudi Sreenivasa Saravan
 
PhD student, Electronics Engineering,
1054, FENS, Sabanci University,
Orhanli, 34956,
Tuzla, Istanbul, Turkey.