[mems-talk] Problem with DC Sputter

[Brent Garber]

Saravan,

Is your system a DC magnetron sputterer?   If so, have you changed your 
target's position?  I did that once and the magnet in the other position 
was not as strong and I was unable to get a plasma.  Also have you 
changed your spacing from your target to your sample?  You should have 
some type of ion capture shield around the rim of your target.  Is that 
spaced correctly?  And lastly, are you using the same gas pressure as 
before?

Brent

saravan kallempudi wrote:
> Dear Members,
>
> I have a problem with my DC sputter. We used to sputter Nickel but we have strange problem now having plasma inside chamber but unable to sputter nickel. I thought of target poisoning and I cleaned the target with Nitricacid and then also I was not able to move forward. Can anyone suggest me in this!