[mems-talk] Problem with DC Sputter

[Birol Kuyel]

May have overheated the magnetron and loose the magnetic field strength of
of your permenant magnets

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of saravan kallempudi
Sent: Thursday, August 02, 2007 6:55 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] Problem with DC Sputter


Dear Members,

I have a problem with my DC sputter. We used to sputter Nickel but we have
strange problem now having plasma inside chamber but unable to sputter
nickel. I thought of target poisoning and I cleaned the target with
Nitricacid and then also I was not able to move forward. Can anyone suggest
me in this!