[mems-talk] Aluminum etchand request

Mustafa Celik de_po_me at yahoo.com
Sat Aug 4 18:05:06 EDT 2007


Hi all,

I am trying to pattern a thin film of Al which is
coated on top of Indium-Tin-Oxide(ITO)layer. However
widely used MF319 positive PR Developer demages the
ITO. I've also tried lift-off but the result was not
satisfactory. Could you suggest me an alternative Al
etchand which does not attact ITO ?

Thanks in advance... 


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