[mems-talk] Parameters for VHF-PECVD to plasma bond pdms to glass

[Vishwa]

Hi,
I am trying to use the VHF-PECVD to plasma(oxygen) treat pdms and
glass, to bond them. So far, I have had no luck. We have treid
(25mtorr, 25w, 2min), (25mtorr,25w.10sec) and (25mtorr,25w,10min).
None of these seem to help. Can any of you suggest what might be the
right parameters.

Thanks in advance
Vishwa