[mems-talk] Using AZ9260 on i-line or broadband (h-line)

[Yue Mun Pun, Jeffrey]

Hi,
I have been using AZ9260 for my lift-off processes using broadband exposure at 1500mJ/cm2.  Today I had accidentally switched to the i-line (365nm) mode at the same energy dose.  I have read that wavelength of light may contribute to difference in sidewall profile.  However in my case, my structures are huge (about 1mm by 600um), so this should not be of any effect for lift-off.
Can anyone share with me what are other consequences of using i-line versus h-line for AZ9260?  Thanks!
 
Jeffrey