[mems-talk] Si diphragm

[ashwini jambhalikar]

Dear Friends,

While making 20 micron -40 micron diaphragm in DRIE machine, I have observed
that the diaphragm gets popped up from the non exposed side.(the side which
is not seeing plasma).
Has anybody encountered something similar..what can be the possible cause of
this..has anybody encountered similar behaviour in wet etching..

Thanks,
Ashwini.