[mems-talk] lines SU-8 sidewall

Chen Han Lee DCL815 at bham.ac.uk
Thu Aug 16 19:11:51 EDT 2007


Hi Colleagues,
 
I am using su-8 to build thick structures,
have anyone experience vertical lines on the walls of the su-8 structures?
what are they called and what caused them?
 
thanks a lot
 
 
Chen-Han Lee
Microsystems Group
University of Birmingham
B15 2TT UK
 
email: dcl815 at bham.ac.uk
tel: +44 121 4144260


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