[mems-talk] dry etch recipe for Prolift100 polyimide (Brewer Science)

[Jill Yang]

Anyone used Brewer Science's polyimide (prolift-100)? How to dry etch a 
"clean" via without residue? Oxygen plasma with photoresist mask doesn't do 
a good job --- lot of grass at the bottom of the via.

Thanks.
-Jill