[mems-talk] dry etch recipe for Prolift100 polyimide (Brewer Science)

[bobhendu at aol.com]

You probably need to add about 3-5% CF4 to your receipe. That should be enough to etch the carbon filler material used in most polyimide formulations. Bob Henderson


-----Original Message-----
From: Jill Yang <jillyyang at hotmail.com>
To: mems-talk at memsnet.org
Sent: Thu, 16 Aug 2007 8:34 pm
Subject: [mems-talk] dry etch recipe for Prolift100 polyimide (Brewer Science)


Anyone used Brewer Science's polyimide (prolift-100)? How to dry etch a "clean" via without residue? Oxygen plasma with photoresist mask doesn't do a good job --- lot of grass at the bottom of the via.