[mems-talk] dry etch recipe for Prolift100 polyimide (BrewerScience)

[Jill Yang]

>From: bobhendu at aol.com
>Reply-To: General MEMS discussion <mems-talk at memsnet.org>
>To: mems-talk at memsnet.org
>Subject: Re: [mems-talk] dry etch recipe for Prolift100 polyimide 
>(BrewerScience)
>Date: Fri, 17 Aug 2007 12:42:34 -0400
>
>You probably need to add about 3-5% CF4 to your receipe. That should be 
>enough to etch the carbon filler material used in most polyimide 
>formulations. Bob Henderson
>

Yes, I guess we all know that additional CF4 "should" remove the grass. But
in fact it doesn't work well.