[mems-talk] Glass to glass bonding

Rashid, Mamun M.Rashid at tees.ac.uk
Mon Aug 20 10:15:29 EDT 2007


Hello,
You can bond two glass wafers by annealing bonding at room temperature.
You do not need any intermediate layers to do that. 

Paper: Sensors and Actuators B: Chemical Volume 119, Issue 1, 24
November 2006, Pages 335-344

Best Wishes,

Mamun Rashid 
PhD Student 
Centre for Nano & Microsystems
University of Teesside
TS1 3BA. U.K
www.mamun.info
+44(0)164 234 2428

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of P.E.M. Kuijpers
Sent: 20 August 2007 13:07
To: mems-talk at memsnet.org
Subject: [mems-talk] Glass to glass bonding

Hi all,

Is there a way to bond two glass wafers (Eagle glass ) directley to each
other without any intermediate layer??


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