[mems-talk] dry etch recipe for Prolift100 polyimide (BrewerScience)

[Gordon Whitlock]

Sometimes the polyimide will over heat during plasma processing--the
polyimide can carbonize and leave grass.  Hard to get off.  

Reduce the ion bombardment.  Low power and use a plasma system, not RIE

sample in the plasma, and/or using a hybrid reactor can accomplish this.

Gordon Whitlock
Glow Research

-----Original Message-----
From: bobhendu at aol.com [mailto:bobhendu at aol.com] 
Sent: Friday, August 17, 2007 9:43 AM
To: mems-talk at memsnet.org
Subject: Re: [mems-talk] dry etch recipe for Prolift100 polyimide
(BrewerScience)

You probably need to add about 3-5% CF4 to your receipe. That should be
enough to etch the carbon filler material used in most polyimide
formulations. Bob Henderson