[mems-talk] EDS penetration depth

Jon Hiller hiller at anl.gov
Tue Aug 21 15:39:22 EDT 2007


That depends on the energy of the electrons.  What voltage do you plan
to use?  If you provide this I can calculate the penetration depth for
you using Electron Flight Simulator (a Monte Carlo simulation).

Jon

Jon M. Hiller
Electron Microscopy Center
Argonne National Laboratory
9700 South Cass Avenue
Building 212, Room A257
630-252-7904


More information about the MEMS-talk mailing list