[mems-talk] Ag deposition on Si

Kirt Williams kirt_williams at sbcglobal.net
Sun Aug 26 20:46:37 EDT 2007


See http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf .
Ag was evaporated onto Si at 0.5 nm/s. A 10-nm Cr adhesion layer was used.
    --Kirt Williams

----- Original Message ----- 
From: "Vikrant A. Chaudhari :)" <vikrant.c at iitb.ac.in>
To: <mems-talk at memsnet.org>
Sent: Monday, August 20, 2007 9:33 AM
Subject: [mems-talk] Ag deposition on Si

> hello friends,
> 
> has any one tried Ag deposition on Si 
> 
> vikrant


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