[mems-talk] Spin coating AZ9260 on polymerised SU-8

Yue Mun Pun, Jeffrey g0500396 at nus.edu.sg
Tue Aug 28 02:27:48 EDT 2007


Hi,
I am trying to coat AZ9260 on polymerised SU-8 2005 in order to pattern gold conductors on the SU-8.  Has anyone had any experience on this before?  It seems that the AZ9260 keeps spinning off the SU-8 when I use 2100rpm for 60s.
 
Jeffrey


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