[mems-talk] Spin coating AZ9260 on polymerised SU-8

[Peter Svasek]

Hi Jeffrey,
I had a similar Problem when I tried ro spin SU-8 onto a crosslinked and 
hardbaked
layer of SU-8. It formed just single droplets on the surface of the 
hardbaked SU-8.
A short (1 min) treatment with O2-Plasma fixed this problem.
Good luck

Peter Svasek
Vienna University of Technology
Institute of Sensor- and Actuator Systems
Gusshausstrasse 27-29 / 366
1040 Wien
Austria



Yue Mun Pun, Jeffrey schrieb:
> Hi,
> I am trying to coat AZ9260 on polymerised SU-8 2005 in order to pattern gold conductors on the SU-8.  Has anyone had any experience on this before?  It seems that the AZ9260 keeps spinning off the SU-8 when I use 2100rpm for 60s.