[mems-talk] Negative resist studies

[Ron Martin]

Hello,

	I am looking into obtaining literature on negative resist.  I was
told that in the 70s, there was an active body of research pertaining to
negative resist studies.  I am primarily interested in negative
cross-linking events (especially the accidental, non-intentional ones that
lead to residue).  I appreciate any help.  Thanks.  

Ron Martin
BEI Systron Donner
QFAB Lithography Engineer
office:  925-671-6563