[mems-talk] Thick SU-8 Patterning

[Xiaoguang Liu]

Dear MEMS community

I'm looking into the possibility of using SU-8 to form rectangular cavity of
about 4mmx4mm and 700-900um deep. From SU-8 datasheet, it seems that >200um
SU-8  is possible with a single spin coat. So I guess maybe multiple coating
of SU-8 could possibly approach the thickness I want.

I do not have any experience with SU-8 and I'm seeking advice from more
expeienced users. Thanks a lot.

-- 
Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79 at purdue.edu