[mems-talk] HMDS For Adhesion

[Richard B. Keithley]

Hey Y'all!

I want to use HDMS for adhesion of a DQ resist to my silicon substrate. 
  I have looked in literature different groups use varying 
concentrations of HDMS (ex:  10%, 20%, 100%).  I was wondering if 
anyone had any personal experience they could share to help me out.

Thanks!

Richard B. Keithley
UNC Analytical Chemistry Graduate Student &
National Defense Science and Engineering Graduate Fellow
Wightman Research Group
Chapel Hill, NC 27599
919-962-1108