[mems-talk] Thick SU-8 Patterning

[Xiaoguang Liu]

Dear Kevin

Thank you for the reply. Our major concern is the surface roughness of
the cavity. I'm actually not sure about the surface finish quality of
a machined cavity. But We are looking at sub-micron roughenss. Thanks

Best
Leo

On 8/30/07, K.P.Nichols at utwente.nl <K.P.Nichols at utwente.nl> wrote:
> Is there any particular reason that you need to use SU-8? If there isn't, this sounds like something that could be made in a machine shop out of a wide variety of materials. You might want to consider that first, as a 700 micron "film" will give you lots of problems.
-- 

Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79 at purdue.edu