[mems-talk] Al electroplating recipe

[damghanian mitra]

Hi!

I'm looking for a good Al electroplating recipe for
deposition of 2um Al layer on a micron size Aluminum
pattern. Do you think particle sizes of the
electroplated Al layer would make any problem or not?
My goal is to have a smooth layer after the process.
Is there any specific cleaning issue that should be
considered before the process? I would appreciate your
comments on pre-cleaning process, electrolyte, time
and current used in the process.

Thanks,
Mitra