[mems-talk] TaN and IrO2 deposition

Chin-Jen Chiang chinjen_chiang at yahoo.com.tw
Thu Dec 6 12:57:02 EST 2007

Previous message: [mems-talk] Al electroplating recipe
Next message: [mems-talk] information about silicon flatness
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I used to deposit IrO2 with MOCVD.
  Regarding TaN, I have no idea about that.
   
  Lawrence

schahrazede.mouaziz at epfl.ch writes:
  Hello,

Does someone know the way how do we deposit TaN and IrO2?

Best

Previous message: [mems-talk] Al electroplating recipe
Next message: [mems-talk] information about silicon flatness
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the MEMS-talk mailing list