[mems-talk] Au-Au thermocompression bonding

Joseph Grogan jgrogan at seas.upenn.edu
Wed Dec 12 12:08:32 EST 2007


Is there anybody out there with personal experience performing wafer 
bonding by gold-to-gold thermocompression bonding? I've found several 
papers, and performed several experiments, but I'm getting mixed results 
and I'd like to discuss my process with someone who's done it.

thank you,
Joe Grogan


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