[mems-talk] selective etching of p-AlGaN from i-AlGaN

Yuzhu Li yuzhul at eden.rutgers.edu
Sat Dec 15 22:41:34 EST 2007

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Hi, p-type AlGaN was grown on i-AlGaN, how to selectively remove p-type 
AlGaN from i-AlGaN? Prefer dry etching, but wet etching is also OK. Please 
give reference, thanks.

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