[mems-talk] Removal of native oxide layer on Nickel

Martin Lapisa lapisa at ee.kth.se
Mon Dec 17 05:08:01 EST 2007


Hello all!

In order to electroless plate Nickel on a Nickel start layer and obtain
homogenous results I dip the wafers into concentrated HCl/Isoprop mixture to
remove the native oxide before plating. I obtain quite good results with
this procedure but since HCl is quite rough towards a resist layer that is
also on the wafers, I would like to use a softer way to get rid of the
oxide.

Best regards,
Martin



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