[mems-talk] SU-8 (micro)bubbles

[Herman Walgraeve - TNW]

Hi Abdou,

The dispensing is done using a syringe , distributing manually the SU-8
over the whole wafer surface beginning from the center towards the edge.
When completely covered, the spinner is started.

To fill the syringe (10 ml), I open it at the back and pore the SU-8
into it directly from the bottle.


Herman.

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of abdou sar
Sent: vrijdag 14 december 2007 18:11
To: General MEMS discussion
Subject: RE: [mems-talk] SU-8 (micro)bubbles

Hi Herman,
would you elaborate a bit more on how manually you are dispensing the
Su8?
 
Cheers,
 
Abdou.