[mems-talk] AZ CTP 100 Photoresist

[Sudesh Bhagwat]

Hello All,
I have been using Clariant Photoresist AZ CTP 100 (27cp) to construct what
is called as a pillar structure in OLED displays. I have a peculiar
observation. I coat ~ 4 micron of photoresist on the substrate. After
exposing and developing the photoresist only 2.5 micron of photoresist
remains in the structure and the rest approx 30% of the photoresist is lost.
So instead of 4 micron pillar I have only a 2.5 micron pillar. I have
checked the thickness (after exposing and developing) using a Dektak
Profilometer and confirmed the observation using SEM. I fail to understant
this behaviour. Has anyone used this particular photoresist and has the same
observation.

Regards

Dr. Sudesh S Bhagwat,
Group Leader,Substrate Processing group,
Samtel Centre for Display Technologies,
Indian Institute of Technology Kanpur,
Kanpur - 208016. INDIA
email - ssbhagwat at gmail.com
Tel:+91-(0)512-2596088
Fax:+91-(0)512-2596089