[mems-talk] Metal coatings for hot-embossing tools

Gareth Jenkins gjenkins at f2s.com
Thu Feb 1 06:11:29 EST 2007


Hi

I wish to deposit metal coatings on SU-8 structures to serve as tools 
for hot-embossing.
I know nickel is commonly electroplated for this purpose but the 
facility I have access to currently only has an evaporator with silver 
and aluminium sources (we have no electroplating facility).
Does anyone know if evaporated layers of silver or aluminium stand any 
chance of working? I only need to replicate a few structures but I need 
to make them quickly so I don't have too much time to get a nickel 
source or set-up an electroplating facility.
N.B. I will be embossing into COC and PMMA.
Many thanks

Gareth


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