[mems-talk] Which one have higher oxidation rate at Rm temp(Si(100) or Polysilicon)

[wanhong Cheung]

Dear Members,
   
  Can any one tell me the oxidation rate of single-crystal silicon(100) have higher or lower 
   
  oxidation rate then polysilicon at room temperature and why?
    
   Because for my result the single-crystal silicon(100) have lower oxidation rate then polysilicon,but the initial thickness the single-crystal silicon is higher then the polysilicon.  
   So is that mean the single-crystal silicon(100) have higher oxidation rate at room temperature.WHY?
   
  
Thanks

Jay