[mems-talk] Equipment for ramped heating

[Peng Li (Paul)]

Hey everybody,

I am making mold on silicon wafer by SU-8 photoresist, however, sometimes
I get "wrinkled surface". I heared that hotplate is better than convection
oven, ramped heating is also helpful, but I am not sure.

Could you please recommend an inexpensive equipment for ramped heating of
SU-8 mold? Is there any other better ways to avoid wrinkled surface?

Thanks!

Peng Li