[mems-talk] HI

Kirt Williams kirt_williams at sbcglobal.net
Fri Feb 2 12:03:55 EST 2007


For an introduction, review of materials and processes, packaging, and 
descriptions of the function and fabrication of a number of sensors and 
actuators used in the automotive, medical diagnostic, communications, 
consumer, and other industries,
I recommend "An Introduction to Microelectromechanical Systems Engineering, 
2nd Edition," by Nadim Maluf and Kirt Williams, Artech House, 2004, ISBN 
1-58053-590-9.
But then I could be biased.   :-)
    --Kirt Wiliams

----- Original Message ----- 
From: "mohendra roy" <mohendra.roy at gmail.com>
To: "General MEMS discussion" <mems-talk at memsnet.org>
Sent: Friday, February 02, 2007 2:48 AM
Subject: [mems-talk] HI

> HI ALL
> can any one tell me about a good book for MEMS


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