[mems-talk] Re: IR hotplate for softbaking SU-8

[Ken Healy]

> 
> I'm making SU-8 layers on plastic substrates so it is difficult to softbake
> off the solvents on a hotplate because of the low thermal conductivity.
> Does anyone think an infrared hotplate would bake off the solvents?
> 

Yes, quite possibly. Depending on the transparency of your plastic substrates at
the infrared wavelengths used, you may have to heat your SU-8 layers from above
(i.e. not through the plastic substrate).

Have a look at the following paper,

M. Kubenz, U. Ostrzinksi, F. Reuther and G. Gruetzner, "Effective baking of
thick and ultra-thick photoresist layers by infrared radiation", Microelectron.
Eng., 67, 495 (2003).

I have yet not found any commerically available temperature-controlled infrared
heating systems - if you find any, let me know!

Best regards,
Ken