[mems-talk] DRIE etching : how to enlarge the cavities

[RABBIA Laurent]

Hello everybody,

After un DRIE etching (Bosch process), I would like to enlarge the entry of
the cavities. 

I heard about :

- HNO3/HF
- TMAH
- KOH
- different post-bake for photoresist 

Has someone already done this ?

If yes, what's the process to follow ?

Best regards.

Laurent.