[mems-talk] DRIE etching : how to enlarge the cavities

[Roger Shile]

Does "un DRIE etching" refer to filling the hole that you previously etched?

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of RABBIA Laurent
Sent: Monday, February 05, 2007 12:37 AM
To: 'mems-talk at memsnet.org'
Subject: [mems-talk] DRIE etching : how to enlarge the cavities

Hello everybody,

After un DRIE etching (Bosch process), I would like to enlarge the entry of
the cavities. 

I heard about :

- HNO3/HF
- TMAH
- KOH
- different post-bake for photoresist 

Has someone already done this ?

If yes, what's the process to follow ?