[mems-talk] deposit alloy

[David Nemeth]

It's very challenging to evaporate an alloy for the reason you describe.
Sputtering is usually what you need to do.  A new sputtering target may not
give you the proper alloy composition, but after running it for a bit it
eventually will.

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of B Frank
Sent: Tuesday, February 06, 2007 1:34 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] deposit alloy

Hi, All,
I have a problem to deposit alloy in thermal evaporator system.
The alloy is Al(2% Si). During deposition, the silicon was left at the
boat, because the melting point of Si is much higher than Al.
The alloy is wire, so alreay mixed before i receive it.
Is there anybody have such experience? Is it possible to evaporate
such alloy in thermal evaporator system? How about deposit Au(1% Sb)?
Y