[mems-talk] anodic bonding of glass and si

Daniela Kögler Daniela.Koegler at hs-esslingen.de
Wed Feb 7 05:00:31 EST 2007


Hi,

I tried to bond a glass (pyrex) and si wafer with 1000 V, 430°C and 30
minutes (point cathode), both wafer cleaned with acetone. Unfortunately it
did not work. There was only a vacuum between the wafers and it was 
possible to separate them after the bonding.

I appreciate your help and any kind of advice.
Arnold



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