[mems-talk] Carriers

[Mac McReynolds]

Group,

I'm trying to develop a process that requires etching of 6 and 7 inch square substrates (essentially photomask blanks).  Problem is that I cannot find a vendor that makes PFA boats/carriers for this size.  Entegris no longer carries much mask stuff.  Anybody know a source??

Mac McReynolds
Process Development Manager
Caliper Life Sciences
605 Fairchild Drive
Mountain View, CA 94043
Tel:  650-623-0710
Fax:  650-623-0521