[mems-talk] thermal shock of sapphire wafers

[Goodwin, Scott]

Hi,

I recently had a 100mm sapphire wafer crack shortly after it was placed
on a 350C PECVD platen.  From google it appears there is some increased
risk with sapphire compared to silicon wafers.   Does anyone have some
direct experience with handling sapphire wafers who could give me some
pointers, or was I just unlucky?  (Is scribing a bigger problem than for
silicon, can they handle hot plate dehydration bakes, etc)  Thanks


Scott