[mems-talk] Refractive Index of Photoresists
mohendra roy
mohendra.roy at gmail.com
Mon Feb 12 04:50:25 EST 2007
It is depend upon the intesity of the expose light on the substract.
On 09/02/07, Robert Black <r-black1 at ti.com> wrote:
>
> In my experience, the refractive index does not change much between
> unexposed and exposed photoresist. The thickness of the resist is a bigger
> factor. This is why swing curves are used to determine what thickness to
> use.
>
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