[mems-talk] sputtering/Ebeam

[Andrew Xiang]

Hi, Sravya,

But sputtering give you tightly packed film. Thermal evaporated film is very 
loose and grainy.
I wonder if sputtered Al film has better reflectivity?

-Andrew


----- Original Message ----- 
From: <sravya at umd.edu>
To: <mems-talk at memsnet.org>
Sent: Monday, July 24, 2006 11:14 AM
Subject: [mems-talk] sputtering/Ebeam


> KSAW:
> I agree with Mr. Suraj Patil.
> Sputtering can be an economic proc=
> ess, but then not really reliable if you want a thin film. also the surf=
> aces are much cleaner and smoother if it is Ebeam.