[mems-talk] Sol-Gel Silicon oxide

Rashid, Mamun M.Rashid at tees.ac.uk
Tue Feb 13 12:16:46 EST 2007


Hello Hicham,
Excess HCl will definitely change the physical property. The prepared
Sol-gel performed well as insulator and thin film on the thin micro and
nano electrode.  
Hope it will help you. This is the most easy to prepare sol-gel. Besides
this, some other techniques available.

Best wishes,
Mamun Rashid
PhD candidate
Teesside Centre for Nanotechnology & Microfabrication.
School of Science & Technology
University of Teesside. 
TS1 3BA. U.K
01642342428
www.mamun.info

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of Hichham-ElDin
Sent: 13 February 2007 16:02
To: General MEMS discussion
Subject: RE: [mems-talk] Sol-Gel Silicon oxide

--- "Rashid, Mamun" <M.Rashid at tees.ac.uk> wrote:

> Hello ,
> You can prepare sol-gel by using ETOH, TEOS and
> water.
> Method 
> Ratio of chemicals
>   ETOH : TEOS: water = 10 :5: 2
> Mix  ETOH , ETOS and water and keep them in the
> sonicator for 30 mins.
> Afterward add 2 drops of conc HCl( it will act as
> catalyst) and leave
> for further 30 mins. Sol gel will be prepared.


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