[mems-talk] Small etcher for polymers like parylene & polyimide

[Jun Chae]

I am at an academic institution and am looking for a small-size etcher for
polymers.
Do you know anybody who supplies a small-size etcher for polymers like
parylene and polyimide?
I am not sure if I need a standard RIE system to etch polymers; all I do is
O2 plasma to burn polymers including a photoresist mask.
Does anybody have any experience of purchasing a R&D size etcher for
polymers?

Thanks,