[mems-talk] High aspect SU-8 molding

Peng Li (Paul) lip at egr.uri.edu
Wed Feb 14 11:40:33 EST 2007


Dear all,

Where can I find some detailed information about high aspect SU-8 molding?
I find I have to do multi-layer molding if I want to make mold depth
larger than 400um.
Thanks!

Peng Li


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