[mems-talk] PDMS to PDMS bonding

[Peng Li (Paul)]

Dear all,

I am now trying to do PDMS to PDMS bonding. I read something about using a
liquid cushion of methanol to prevent instant boding after plasma
treatment, and thus allowing alignment of different layers. But it doesn't
work. Is there any tricks about this? My procedure is the follows,

1. drill two holes on the PDMS as the outlet for methanol evaporation.

2. Plasma treatment.

3. put the plasma treated sample in methanol for 5 mins.

3. heat in a convection oven for 80mins at 85C.

The other plasma treated samples at the same condition are all nicely
bonded without doing step 3.

Peng Li