[mems-talk] PDMS to PDMS bonding

[abdou sar]

Hi Peng Li,
first of all without step 3 how long are you waiting to put the two PDMS slab in contact?
As far I know the time is a big issue due to the hydrophobic recovery of the PDMS after a O2 plasma treatment. It has been reported in different papers that you have to put in contact the two PDMS slab within 1 min after exposure  to O2 plasma. So you should try just to put a drop of methanol between the layers and do your alignement.
 
Hope that will help you!
 
Cheers, 
 
Abdou